TY  - CONF
AU  - E Jablonski
AU  - Vivek Prabhu
AU  - S Sambasivan
AU  - Daniel Fischer
AU  - Eric Lin
AU  - D Goldfarb
AU  - M Angelopolous
AU  - H Ito
C2  - Proceedings of SPIE, Santa Clara, CA, US
DA  - 2004-09-01 00:09:00
LA  - en
M1  - 5376
PB  - Proceedings of SPIE, Santa Clara, CA, US
PY  - 2004
TI  - Surface and Bulk Chemistry of Chemically Amplified Photoresists: Segregation in Thin Films and Environmental Stability Issues
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852294
ER  -