TY  - JOUR
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - Daniel Fischer
AU  - S Sambasivan
AU  - Eric Lin
AU  - Ronald Jones
AU  - Christopher Soles
AU  - Wen-Li Wu
AU  - D Goldfarb
AU  - M Angelopoulos
C2  - Langmuir
DA  - 2005-03-01 00:03:00
LA  - en
M1  - 21 No. 9
PB  - Langmuir
PY  - 2005
TI  - X-ray Absorption Spectroscopy to Probe Surface Composition and Surface Deprotection in Photoresist Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852399
ER  -