TY  - JOUR
AU  - Vivek Prabhu
AU  - Ronald Jones
AU  - Eric Lin
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - Christopher Soles
AU  - Wen-Li Wu
AU  - D Goldfarb
AU  - M Angelopoulos
C2  - Polymeric Materials: Science & Engineering
DA  - 2002-08-01 00:08:00
LA  - en
M1  - 87
PB  - Polymeric Materials: Science & Engineering
PY  - 2002
TI  - Reaction Front Induced Roughness in Chemically Amplified Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852008
ER  -