TY  - JOUR
AU  - B Vogt
AU  - D Goldfarb
AU  - M Angelopoulos
AU  - Christopher Soles
AU  - C Wang
AU  - Vivek Prabhu
AU  - P McGuiggan
AU  - Jack Douglas
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - Sushil Satija
C2  - Journal of Microlithography Microfabrication and Microsystems
DA  - 2005-02-01 00:02:00
LA  - en
M1  - 4
PB  - Journal of Microlithography Microfabrication and Microsystems
PY  - 2005
TI  - Water Immersion of Model Photoresists: Interfacial Influences on Water Concentration and Surface Morphology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852338
ER  -