TY  - JOUR
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - Ronald Jones
AU  - Eric Lin
AU  - Christopher Soles
AU  - Wen-Li Wu
AU  - D Goldfarb
AU  - M Angelopoulos
C2  - Journal of Vacuum Science and Technology B
DA  - 2002-01-01 00:01:00
LA  - en
M1  -  20(2)
PB  - Journal of Vacuum Science and Technology B
PY  - 2002
TI  - Combinatorial Methodologies Offer Potential for Rapid Research of Photo-resist Materials and Formulations
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853816
ER  -