TY  - JOUR
AU  - V. Lee
AU  - Christopher Soles
AU  - Hyun Ro
AU  - Daniel Hines
AU  - Ronald Jones
AU  - Eric Lin
AU  - Wen-Li Wu
C2  - Applied Physics Letters
DA  - 2005-12-01 00:12:00
LA  - en
M1  - 87
PB  - Applied Physics Letters
PY  - 2005
TI  - Nanoimprint Pattern Transfer Quality from Specular X-Ray Reflectivity
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852501
ER  -