TY  - JOUR
AU  - B Vogt
AU  - Shuhui Kang
AU  - Vivek Prabhu
AU  - Ashwin Rao
AU  - Eric Lin
AU  - Sushil Satija
AU  - Karen Turnquest
AU  - Wen-Li Wu
C2  - Journal of Vacuum Science and Technology B
DA  - 2007-01-11 00:01:00
LA  - en
M1  - 25
PB  - Journal of Vacuum Science and Technology B
PY  - 2007
TI  - Influence of Base Additives on the Reaction Diffusion Front of Model Chemically Amplified Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852647
ER  -