TY  - CONF
AU  - J Ablett
AU  - Joseph Woicik
AU  - Zs Tokei
C2  - Synchrotron Radiation Instrumentation: Ninth International Conference 879 , , 1
DA  - 2007-10-01 00:10:00
LA  - en
PB  - Synchrotron Radiation Instrumentation: Ninth International Conference 879 , , 1
PY  - 2007
TI  - Preliminary Hard X-ray Micro-spectroscopic investigations on Thin-Film Ta-and-W Based Diffusion Barriers for Copper Interconnect Technology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854334
ER  -