TY  - JOUR
AU  - Yiping Liu
AU  - Wen-Li Wu
AU  - B Foran
AU  - D Gidley
AU  - Hae-Jeong Lee
AU  - Barry Bauer
AU  - B Vogt
C2  - Advanced Metalization Conference
DA  - 2021-10-12 15:10:19
LA  - en
PB  - Advanced Metalization Conference
PY  - 2021
TI  - The Pore Structure and Its Impacts on Property and Performance of a Spin-on Porous Low k Dielectric
ER  -