TY  - JOUR
AU  - Daniel Josell
AU  - S Kim
AU  - Daniel Wheeler
AU  - Thomas Moffat
AU  - S Pyo
C2  - Journal of the Electrochemical Society
DA  - 2003-04-03 00:04:00
LA  - en
M1  - 150
PB  - Journal of the Electrochemical Society
PY  - 2003
TI  - Interconnect Fabrication by Superconformal Iodine-Catalyzed Chemical Vapor
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853177
ER  -