TY - JOUR AU - Charles Bouldin AU - William Wallace AU - G Lynn AU - S Roth AU - Wen-Li Wu C2 - Japanese Journal of Applied Physics DA - 2000-01-01 00:01:00 LA - en M1 - 88(2) PB - Japanese Journal of Applied Physics PY - 2000 TI - Thermal Expansion Coefficients of Low-K Dielectric Films From Fourier Analysis of X-Ray Reflectivity UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853677 ER -