TY  - JOUR
AU  - Ravi Kummamuru
AU  - L Hu
AU  - Lawrence Cook
AU  - M Efremov
AU  - E Olson
AU  - Martin Green
AU  - L Allen
C2  - Journal of Microelectromechanical Systems
DA  - 2008-05-05 00:05:00
LA  - en
PB  - Journal of Microelectromechanical Systems
PY  - 2008
TI  - Close Proximity Self-Aligned Shadow Mask for Sputter Deposition Onto a Membrane or Cavity
ER  -