TY  - JOUR
AU  - Ronald Jones
AU  - T Hu
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - R Kolb
AU  - D Casa
AU  - P Bolton
AU  - Z Barclay
C2  - Applied Physics Letters
DA  - 2003-01-01 00:01:00
LA  - en
M1  -  83(19)
PB  - Applied Physics Letters
PY  - 2003
TI  - Small Angle X-ray Scattering as a Tool for Sub-100 nm Pattern Characterization
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853894
ER  -