TY  - CONF
AU  - V. Lee
AU  - Christopher Soles
AU  - D Liu
AU  - Barry Bauer
AU  - Eric Lin
AU  - Wen-Li Wu
C2  - International Interconnect Technology Conference (IITC) Proceeding, Burlingame, CA
DA  - 2003-01-01 00:01:00
LA  - en
PB  - International Interconnect Technology Conference (IITC) Proceeding, Burlingame, CA
PY  - 2003
TI  - Structural Characterization of Methylsilsesquioxane-Based Porous Low-k using X-ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853912
ER  -