TY  - JOUR
AU  - S Yang
AU  - C Pai
AU  - O Nalamasu
AU  - E Reichmanis
AU  - P Mirau
AU  - Yaw Obeng
AU  - J Seputro
AU  - Eric Lin
AU  - V. Lee
C2  - International Conference on Polymers in Electronic Packaging
DA  - 2001-01-01 00:01:00
LA  - en
M1  - 42(1)
PB  - International Conference on Polymers in Electronic Packaging
PY  - 2001
TI  - Design of a Nanoporous Ultra Low-Dielectric Constant Organosilicate
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851922
ER  -