TY  - JOUR
AU  - Shuhui Kang
AU  - B Vogt
AU  - Vivek Prabhu
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - David VanderHart
AU  - Ashwin Rao
AU  - Karen Turnquest
C2  - Macromolecules
DA  - 2007-02-09 00:02:00
LA  - en
M1  - 40
PB  - Macromolecules
PY  - 2007
TI  - Characterization of Compositional Heterogeneity in Chemically Amplified Photoresist Polymer Thin Films with Infrared Spectroscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852648
ER  -