TY  - JOUR
AU  - Daniel Josell
AU  - Daniel Wheeler
AU  - Thomas Moffat
C2  - Electrochemical and Solid State Letters
DA  - 2002-01-01 00:01:00
LA  - en
M1  - 5
PB  - Electrochemical and Solid State Letters
PY  - 2002
TI  - Superconformal Electrodeposition in Vias
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853111
ER  -