TY - JOUR AU - J Allain AU - M Nieto AU - M Hendricks AU - A Hassanein AU - Charles Tarrio AU - Steven Grantham AU - Vivek Bakshi C2 - SPIE DA - 2007-10-01 00:10:00 LA - en M1 - 6517 PB - SPIE PY - 2007 TI - Energetic and Thermal Sn Interactions and Their Effect on EUVL Source Collector Mirror Lifetime at High Temperatures ER -