TY  - CONF
AU  - D Chen
AU  - D DeWitt
AU  - Benjamin Tsai
AU  - Kenneth Kreider
AU  - William Kimes
C2  - Advanced Theramal Processing of Semiconductors, International Conference | 10th | | IEEE, Vancouver, 1, CA
DA  - 2002-09-01 00:09:00
LA  - en
M1  - 2002
PB  - Advanced Theramal Processing of Semiconductors, International Conference | 10th | | IEEE, Vancouver, 1, CA
PY  - 2002
TI  - Effects of Wafer Emissivity on Rapid Thermal Processing Temperature Measurement
ER  -