TY  - CONF
AU  - Sasa Bajt
AU  - H Chapman
AU  - Nhan Nguyen
AU  - J Alameda
AU  - J Robinson
AU  - M Malinowski
AU  - E Gullikson
AU  - Andrew Aquila
AU  - Charles Tarrio
AU  - Steven Grantham
C2  - Emerging Lithographic Technologies, Conference | 7th | Emerging Lithographic Technologies VII | SPIE, Undefined
DA  - 2003-06-01 00:06:00
LA  - en
M1  - 5037
PB  - Emerging Lithographic Technologies, Conference | 7th | Emerging Lithographic Technologies VII | SPIE, Undefined
PY  - 2003
TI  - Design and Performance of Capping Layers for EUV Multilayer Mirrors
ER  -