TY  - JOUR
AU  - S Grantham
AU  - Charles Tarrio
AU  - Thomas Lucatorto
C2  - Journal of Vacuum Science and Technology B
DA  - 2002-12-01 00:12:00
LA  - en
M1  - 20
PB  - Journal of Vacuum Science and Technology B
PY  - 2002
TI  - Accurate Reflectometry for Extreme-Ultraviolet Lithography at the National Institute of Standards and Technology
ER  -