TY  - JOUR
AU  - Shuhui Kang
AU  - Wen-Li Wu
AU  - Kwang-Woo Choi
AU  - Vivek Prabhu
AU  - Anuja De Silva
AU  - Christopher Ober
C2  - Macromolecules
DA  - 2010-04-14 00:04:00
LA  - en
PB  - Macromolecules
PY  - 2010
TI  - Characterization of the photoacid diffusion length and reaction kinetics in EUV photoresists with IR spectroscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904320
ER  -