TY  - JOUR
AU  - H Hubner
AU  - M. Moertelmaier
AU  - Pavel Kabos
AU  - M. Fenner
AU  - C Rankl
AU  - Atif Imtiaz
C2  - Review of Scientific Instruments
DA  - 2010-11-02 00:11:00
DO  - https://doi.org/10.1063/1.3491926
LA  - en
M1  - 81
PB  - Review of Scientific Instruments
PY  - 2010
TI  - Calibrated nanoscale capacitance measurements using a scanning microwave microscope
ER  -