TY  - CONF
AU  - Richard Silver
AU  - Bryan Barnes
AU  - Nien Zhang
AU  - Hui Zhou
AU  - Andras Vladar
AU  - John Villarrubia
AU  - Regis Kline
AU  - Daniel Sunday
AU  - Alok Vaid
C2  - Proceedings of the SPIE, San Jose, CA, US
DA  - 2014-04-14 00:04:00
DO  - https://doi.org/10.1117/12.2048225
LA  - en
M1  - 9050
PB  - Proceedings of the SPIE, San Jose, CA, US
PY  - 2014
TI  - Optimizing Hybrid Metrology through a Consistent Multi-Tool Parameter Set and Uncertainty Model
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915846
ER  -