TY  - JOUR
AU  - Jungjae Park
AU  - Lingfeng Chen
AU  - Quandou Wang
AU  - Ulf Griesmann
C2  - Optics Express
DA  - 2012-08-17 00:08:00
LA  - en
PB  - Optics Express
PY  - 2012
TI  - A modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafers
ER  -