TY  - JOUR
AU  - Mohammad Olfatnia
AU  - Siddharth Sood
AU  - Jason Gorman
AU  - Shorya Awtar
C2  - IEEE Journal of Microelectromechanical Systems (Journal of MEMs)
DA  - 2013-04-30 00:04:00
LA  - en
M1  - 22
PB  - IEEE Journal of Microelectromechanical Systems (Journal of MEMs)
PY  - 2013
TI  - Large Stroke Electrostatic Comb Drive Actuators Enabled by a Novel Flexure Mechanism
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912124
ER  -