TY - JOUR AU - Mohammad Olfatnia AU - Siddharth Sood AU - Jason Gorman AU - Shorya Awtar C2 - IEEE Journal of Microelectromechanical Systems (Journal of MEMs) DA - 2013-04-30 00:04:00 LA - en M1 - 22 PB - IEEE Journal of Microelectromechanical Systems (Journal of MEMs) PY - 2013 TI - Large Stroke Electrostatic Comb Drive Actuators Enabled by a Novel Flexure Mechanism UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912124 ER -