TY  - JOUR
AU  - Vladimir Ukraintsev
AU  - Ndubuisi Orji
AU  - Theodore Vorburger
AU  - Ronald Dixson
AU  - Joseph Fu
AU  - Richard Silver
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2013-04-01 00:04:00
LA  - en
M1  - 12
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2013
TI  - Distributed Force Probe Bending Model of CD-AFM Bias
ER  -