TY  - CONF
AU  - Richard Silver
AU  - Bryan Barnes
AU  - Martin Sohn
AU  - Hui Zhou
AU  - Jing Qin
C2  - AIP Proceedings, Grenoble, FR
DA  - 2011-11-14 00:11:00
DO  - https://doi.org/10.1063/1.3657912
LA  - en
M1  - 1395
PB  - AIP Proceedings, Grenoble, FR
PY  - 2011
TI  - Fundamental Limits of Optical Patterned Defect Metrology
ER  -