TY  - JOUR
AU  - Adam Berro
AU  - Andrew Berglund
AU  - Peter Carmichael
AU  - Jong Kim
AU  - James Liddle
C2  - ACS Nano
DA  - 2012-10-26 00:10:00
DO  - https://doi.org/10.1021/nn304285m
LA  - en
M1  - 6
PB  - ACS Nano
PY  - 2012
TI  - Super-resolution Optical Measurement of Nanoscale Photoacid Distribution in Lithographic Materials
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909231
ER  -