TY  - JOUR
AU  - Hongliang Shi
AU  - Hai-Jun Su
AU  - Nicholas Dagalakis
AU  - John Kramar
C2  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
DA  - 2012-08-21 00:08:00
LA  - en
M1  - 37
PB  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
PY  - 2012
TI  - Kinematic Modeling and Calibration of a Flexure Based Hexapod Nanopositioner
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911830
ER  -