TY  - JOUR
AU  - Kai Li
AU  - Pradeep Namboodiri
AU  - Sumanth Chikkamaranahalli
AU  - Gheorghe Stan
AU  - Ravikiran Attota
AU  - Joseph Fu
AU  - Richard Silver
C2  - Applied Physics Letters
DA  - 2011-08-09 00:08:00
LA  - en
M1  - 29
PB  - Applied Physics Letters
PY  - 2011
TI  - Controlling Formation of Atomic Step Morphology on Micro-patterned Si (100)
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907301
ER  -