TY  - HEAR
AU  - Xiaoxiao Zhu
AU  - H Gu
AU  - Qiliang Li
AU  - Helmut Baumgart
AU  - D. Ioannou
AU  - John Suehle
AU  - Curt Richter
DA  - 2009-10-06 00:10:00
LA  - en
PY  - 2009
TI  - Application of ALD High-k Dielectric Films as Charge Storage Layer and Blocking Oxide in Nonvolatile Memories
ER  -