TY - JOUR AU - D Newell AU - S Richman AU - P Nelson AU - T Stebbins AU - P Bender AU - J Faller C2 - Review of Scientific Instruments DA - 1997-01-01 00:01:00 LA - en PB - Review of Scientific Instruments PY - 1997 TI - An ultra low-noise, low-frequency, six degrees of freedom active vibration isolator ER -