TY - JOUR AU - Newell, D AU - Richman, S AU - Nelson, P AU - Stebbins, T AU - Bender, P AU - Faller, J C2 - Review of Scientific Instruments DA - 1997-01-01 00:01:00 LA - en PB - Review of Scientific Instruments PY - 1997 TI - An ultra low-noise, low-frequency, six degrees of freedom active vibration isolator ER -