TY  - JOUR
AU  - R Attota
AU  - M Bishop
AU  - M Davidson
AU  - Thomas Germer
AU  - L Howard
AU  - R Larrabee
AU  - E Marx
AU  - R Silver
AU  - M Stocker
C2  - Metrology Pages Inspection Pages and Process Control for Microlithography XIX Proc SPIE
DA  - 2005-01-01 00:01:00
LA  - en
M1  - 5752
PB  - Metrology Pages Inspection Pages and Process Control for Microlithography XIX Proc SPIE
PY  - 2005
TI  - High-resolution optical metrology, ed. by R.M. Silver
ER  -