TY - JOUR AU - G Weaver AU - F Campos AU - S Leone C2 - Mat Res Soc Symp Proc DA - 1993-01-01 00:01:00 LA - en M1 - 285 PB - Mat Res Soc Symp Proc PY - 1993 TI - Hyperthermal Cl atom beam produced by laser vaporization of cryogenic ICl films ER -