TY - JOUR AU - Tanuma, Shigeo AU - Powell, Cedric AU - Penn, David C2 - Journal of Vacuum Science and Technology A DA - 1990-01-01 00:01:00 LA - en M1 - 8 PB - Journal of Vacuum Science and Technology A PY - 1990 TI - Material Dependence of Electron Inelastic Mean Free Paths at Low Energies ER -