TY  - JOUR
AU  - Kristopher Lavery
AU  - B Vogt
AU  - Vivek Prabhu
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - Kwang-Woo Choi
C2  - Journal of Vacuum Science and Technology B
DA  - 2006-11-30 00:11:00
LA  - en
M1  - 24
PB  - Journal of Vacuum Science and Technology B
PY  - 2006
TI  - Exposure Dose Effects on the Reaction-Diffusion Process in Model extreme ultraviolet Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852653
ER  -