TY  - GEN
AU  - Chad Snyder
AU  - F Mopsik
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2001-11-01 00:11:00
DO  - https://doi.org/10.6028/NIST.SP.960-7
LA  - en
M1  - SP960-7
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2001
TI  - NIST Recommended Practice Guide: Capacitance Cell Measurement of the Out-of-Plane Expansion of Thin Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851966
ER  -