TY  - CONF
AU  - Madhulika Korde
AU  - Regis Kline
AU  - Daniel Sunday
AU  - Nick Keller
AU  - Subhadeep Kal
AU  - Cheryl Alix
AU  - Aelen Mosden
AU  - Alain Diebold
C2  - SPIE Advanced Lithography, San Jose, CA, US
DA  - 2020-03-30 00:03:00
LA  - en
PB  - SPIE Advanced Lithography, San Jose, CA, US
PY  - 2020
TI  - X-Ray Metrology of Nanowire/ Nanosheet FETs for Advanced Technology Nodes
ER  -