TY - JOUR AU - Scott Schmucker AU - Pradeep Namboodiri AU - Ranjit Kashid AU - Xiqiao Wang AU - Binhui Hu AU - Jonathan Wyrick AU - Alline Myers AU - Joshua Schumacher AU - Richard Silver AU - Michael Stewart C2 - Physical Review Applied DA - 2019-03-29 00:03:00 DO - https://doi.org/10.1103/PhysRevApplied.11.034071 LA - en M1 - 11 PB - Physical Review Applied PY - 2019 TI - Low-resistance, high-yield electrical contacts to atom scale Si:P devices using palladium silicide UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=926446 ER -