TY  - JOUR
AU  - Yong Kim
AU  - Nicholas Dagalakis
AU  - Young-Man Choi
C2  - Journal of Microelectronic Engineering
DA  - 2018-02-28 00:02:00
DO  - https://doi.org/10.1016/j.mee.2017.11.010
LA  - en
M1  - 187-188
PB  - Journal of Microelectronic Engineering
PY  - 2018
TI  - Optical Fiber Fabry-Pérot Micro-Displacement Sensor for MEMS In-plane Motion Stage
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924100
ER  -