TY  - CONF
AU  - Naftaly Krakover
AU  - Robert Ilic
AU  - Slava Krylov
C2  - The 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, IE
DA  - 2018-04-26 00:04:00
DO  - https://doi.org/10.1109/MEMSYS.2018.8346688
LA  - en
PB  - The 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, IE
PY  - 2018
TI  - Resonant Pressure Sensing Using a Micromechanical Cantilever Actuated by Fringing Electrostatic Fields
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924800
ER  -