TY  - JOUR
AU  - Yoav Kessler
AU  - Robert Ilic
AU  - Slava Krylov
AU  - Alexander Liberzon
C2  - IEEE Journal of Microelectromechanical Systems
DA  - 2018-12-01 00:12:00
DO  - https://doi.org/10.1109/JMEMS.2018.2868776
LA  - en
M1  - 27
PB  - IEEE Journal of Microelectromechanical Systems
PY  - 2018
TI  - Flow sensor based on the snap-through detection of a curved micromechanical beam
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925903
ER  -