TY  - JOUR
AU  - Vikrant Gokhale
AU  - Jason Gorman
C2  - Applied Physics Letters
DA  - 2017-07-05 00:07:00
DO  - https://doi.org/10.1063/1.4990960
LA  - en
M1  - 111
PB  - Applied Physics Letters
PY  - 2017
TI  - Approaching the intrinsic quality factor limit for micromechanical bulk acoustic resonators using phononic crystal tethers
ER  -