TY  - JOUR
AU  - Gaoliang Dai
AU  - Kai Hahm
AU  - Harald Bosse
AU  - Ronald Dixson
C2  - Measurement Science & Technology
DA  - 2017-04-19 00:04:00
LA  - en
M1  - 28
PB  - Measurement Science & Technology
PY  - 2017
TI  - Comparison of line width calibration using critical dimension atomic force microscopes between PTB and NIST
ER  -