TY - JOUR AU - Nir Dick AU - Scott Grutzik AU - Christopher Wallin AU - Robert Ilic AU - Slava Krylov AU - Alan Zehnder C2 - Journal of Vibration and Acoustics-Transactions of the ASME DA - 2018-04-26 00:04:00 DO - https://doi.org/10.1115/1.4039568 LA - en M1 - 140 PB - Journal of Vibration and Acoustics-Transactions of the ASME PY - 2018 TI - Actuation of higher harmonics in large arrays of micromechanical cantilevers for expanded resonant peak separation UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924715 ER -