TY  - CONF
AU  - Houxun Miao
AU  - Mona Mirzaeimoghri
AU  - Lei Chen
AU  - Han Wen
C2  - 2017 International Conference on Optical MEMS and Nanophotonics, Santa Fe, NM, US
DA  - 2017-09-28 00:09:00
DO  - https://doi.org/10.1109/OMN.2017.8051446
LA  - en
PB  - 2017 International Conference on Optical MEMS and Nanophotonics, Santa Fe, NM, US
PY  - 2017
TI  - Deep Silicon Etching for X-Ray Diffraction Devices Fabrication
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923541
ER  -