TY  - JOUR
AU  - Hae-Jeong Lee
AU  - Christopher Soles
AU  - Da-Wei Liu
AU  - Barry Bauer
AU  - Wen-Li Wu
C2  - Journal of Polymer Science Part B-Polymer Physics
DA  - 2002-10-01
LA  - en
M1  - 40
PB  - Journal of Polymer Science Part B-Polymer Physics
PY  - 2002
TI  - Pore Size Distributions in Low-K Dielectric Thin Films From X-Ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852050
ER  -