TY  - JOUR
AU  - Hae-Jeong Lee
AU  - Christopher Soles
AU  - Da-Wei Liu
AU  - Barry Bauer
AU  - Eric Lin
AU  - Wen-Li Wu
C2  - Journal of Applied Physics
DA  - 2006-09-01
LA  - en
M1  - 100
PB  - Journal of Applied Physics
PY  - 2006
TI  - Structural Characteristics of Methylsilsesquioxane Based Porous Low-k Thin Films Fabricated with Increasing Cross-Linked Particle Porogen Loading
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852378
ER  -