TY  - JOUR
AU  - Ronald Jones
AU  - T Hu
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - R Kolb
AU  - D Casa
AU  - P Bolton
AU  - G Barclay
C2  - Applied Physics Letters
DA  - 2003-11-01
LA  - en
M1  - 83
PB  - Applied Physics Letters
PY  - 2003
TI  - Small Angle X-Ray Scattering for Sub-100 nm Pattern Characterization
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852166
ER  -